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Dow Uap D48 Report September 1996
Page 94
94 / 181
Table 36. Effect on £-Ratio of Varying_. Mode-5 Constant B (A= 3)- Part 2
R=l0nm
R=25nm
180 _:_<I>
B=500
B = 1000
B=2000
B::: 500
B = 1000
B =2000
0
1.0
1.0
1.0
1.0
1.0
1.0
5
1.3
1.3
1.3
1.3
1.3
1.3
10
1.7
1.7
1.7
1.7
1.7
1.7
15
2.2
22
2.2
2.2
2.2
2.2
20
2.8
2.8
28
2.8
2.8
2.8
25
3.7
3.6
3.6
3.7
3.7
3.6
30
4.7
4.7
4.5
4.8
4.8
4.7
35
6.1
6.0
5.8
6.2
6.1
6.0
40
7.9
7.7
7.3
8.0
7.9
7.8
45
10.2
9.8
9.2
10.4
10.2
9.9
50
13.0
12.4
11.4
13.4
13.2
12.7
55
16.7
15.7
14.1
17.3
16.9
16.1
60
21.2
19.7
17.1
22.3
21.6
20.3
65
26.9
24.4
20.6
28.7
27.5
25.3
70
33.9
29.9
24.3
36.8
34.8
31.3
75
42.3
36.3
28.3
47.0
43.8
38.5
80
52.3
43.4
325
59.7
54.5
46.6
85
63.9
51.1
36.5
75.4
67.3
55.5
90
77.1
59.1
40.4
94.5
82.2
65.2
95
91.7
67.3
44.1
117.4
98.9
75.3
100
107.3
75.3
47.3
144.4
117.3
85.5
105
123.5
82.9
50.2
175.4
137.0
95.4
110
139.7
89.8
52.7
210.1
157.2
104.7
115
155.4
96.0
54.7
247.9
177.4
113.3
120
170.1
101.4
56.4
287.7
196.9
120.9
125
183.5
106.0
57.8
328.3
215.0
127.5
130
195.3
109.9
58.9
368.2
231.5
133.1
135
205.5
113.0
59.8
406.3
245.9
137.7
140
214.1
115.5
60.5
441.4
258.3
141.5
145
221.2
117.6
61.1
472.8
268.8
144.6
277.4
147.1
150
227.0
119.2
61.5
500.3
155
231.7
120.5
61.8
523.6
284.5
149.0
290.1
150.5
160
235.4
121.5
62.1
543.2
165
238.4
122.2
62.3
559.3
294.6
151.7
240.7
122.8
62.4
572.3
298.2
152.7
170
62.6
582.7
301.0
153.4
175
242.5
123.3
62.6
591.0
303.2
154.0
244.0
123.7
180
9/10/96
85
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